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Abstract: For conventional samples and measurement geometries the spatial resolution of energy dispersive X-ray spectroscopy is limited by a tear drop shaped emission volume to about . This restriction can be substantially improved using thin samples and high acceleration voltage. In this contribution the spatial resolution of energy dispersive X-ray spectroscopy in a scanning electron microscope using thin lamella samples is investigated. At an acceleration voltage of 30kV, an edge resolution down to is observed performing linescans across an interface, using an 80nm thin sample prepared from a GaAs/AlAs-heterostructure. Furthermore, Monte-Carlo simulations of pure elements ranging from sodium to mercury are performed for different sample thicknesses. From the simulations we can derive a simple empirical formula to predict the spatial resolution as a function of sample thickness. [Copyright &y& Elsevier]