8 results on '"Delabie, Annelies"'
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2. Probing the spatial dimensions of nanoscale patterns with Rutherford backscattering spectrometry
3. Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask
4. Deposition of O atomic layers on Si(100) substrates for epitaxial Si-O superlattices: investigation of the surface chemistry
5. Chemical vapor deposition processes for the fabrication of epitaxial Si-O superlattices
6. Interfaces of high- k dielectrics on GaAs: Their common features and the relationship with Fermi level pinning (Invited Paper)
7. Observation and characterization of defects in HfO2 high-K gate dielectric layers
8. Growth mechanisms for Si epitaxy on O atomic layers: Impact of O-content and surface structure.
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