4 results on '"Hayashi, Yasuaki"'
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2. Plasma enhanced chemical vapor deposition of thermally stable and low-dielectric-constant fluorinated amorphous carbon films using low-global-warming-potential gas C 5F 8
3. Investigation of the early stages of diamond film growth by ellipsometric monitoring
4. Increase in nucleation density of diamond film growth by d.c plasma chemical vapor deposition
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