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Abstract: The morphology and microstructure of multi-walled carbon nanotubes (MWCNTs) were modified using ethanol as a mild gas reactant. The etching by OH radicals and deposition of C radicals on the carbon nanotubes were considered to be responsible for the modification of the MWCNT structures and the formation of new carbon nanostructures. The effects of etching and deposition on the MWCNTs were confirmed by using methanol as another gas reactant; this molecule has a higher ratio of hydroxyl radicals to carbon atoms than ethanol. In addition, water vapor, containing no carbon atoms in the molecule, was also applied to etch the MWCNTs as a weak oxidant which resulted in stronger etching effects on the MWCNTs than methanol and ethanol. [Copyright &y& Elsevier]