4 results on '"Kazazis, Dimitrios"'
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2. Achromatic Talbot lithography with nano-ring masks for high-throughput periodic patterning
3. Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning
4. Sub-20 nm Si fins with high aspect ratio via pattern transfer using fullerene-based spin-on-carbon hard masks
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