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The precision glass micromachining technology employing ultrashort laser pulses has reached a state of maturity. This technology enables the precise drilling, cutting, or ablation of various types of glass, achieving accuracy up to a few microns. As laser sources continue to advance in average power and repetition rate, the efficient utilization of laser beam irradiation patterns becomes increasingly crucial. The Bessel beam, known for its ability to create elongated channels in transparent materials because of its invariant focal zone, gains significance in this context. The elongated focal zone of the Bessel beam proves advantageous for expeditious glass cutting, surpassing the efficiency of using a standard Gaussian beam. This study delves into the glass-cutting process by studying asymmetric phase-split diffractive axicon masks to generate such Bessel beams. For this purpose, geometric phase optical elements are created using transparent nanogratings inscribed in the volume of glass. This approach allows high-power asymmetric Bessel-like beams to be generated and experimentally used to investigate beam-shaping performance, ultimately determining the optimal parameter set for applications such as glass stealth dicing. • Analytic investigation of an azimuthally phase-cut axicon mask. • Numerical simulations to find the best cases of asymmetric beam with high contrast. • Geometric phase elements for experimental high-power beam shaping applications. • Glass dicing using a custom element and achieving low roughness of side walls. [ABSTRACT FROM AUTHOR]

Structured light is desired in the micromachining of various materials. As the latest ultrashort laser sources increase the average power by increasing the repetition rate, the efficiency of the process becomes crucial in laser micromachining. The standard Gaussian beam shape, because of its slow ascending/descending slope, is not the most efficient beam, neither in precise energy deposition nor in heat management. Flat-top beams are required for precise and even energy distribution and are used in laser ablation or thin-film removal. We look at a rather abstract concept of polarization singularities and investigate them to create a vector flat-top beam. For this purpose, we devise a beam-shaping method based on the volumetric birefringent nano gratings which allow the generation of high-energy polarization singularities. By tuning the input beam waist, we have generated three most common laser micromachining beam profiles (Gaussian, Flat-top, and ring- or doughnut-shaped). The resulting high-quality and high-energy polarization singularities allow us to systematically demonstrate their use in transparent and opaque material micromachining, as well as the usual application for flat-top beams of thin-film removal. • Vector beams with polarization singularities applied in laser micro processing. • Dynamical shaping of a laser beam in focal zone using a single optical element. • Employment of geometric phase elements for high >92% transmission laser beam shaping. • Generation of flat-top beams without pre- of post-intensity peaks in the focal zone. [ABSTRACT FROM AUTHOR]