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Abstract: The influences of pulse modulation on water-repellent film preparation have been investigated in RF pulse-modulated plasma CVD using C2H2F2 and Ar mixture gases for an improvement of transparency with keeping repellency. In the case of high total pressure of 100 Pa, transparency of the prepared films decreased from 90 to 50% with increasing duty ratio of RF power, while the water contact angle increased from 120 to 160°. On the other hand, in the case of low-pressure of 25 Pa, these properties of the prepared films were almost independent on the duty ratio, keeping high transparency with more than 90% and normal hydrophobic nature with the contact angle of about 100°. [Copyright &y& Elsevier]

We have developed a high-density radio frequency (RF) magnetized sputtering plasma source with a rotational square-shaped magnet arrangement for uniform target utilization. Eight neodymium rod magnets of 30 × 5 × 3 mm, where the connection between N-pole and S-pole magnets is one side of the square, are mounted on a circular iron yoke disc and an iron cover of 5 × 3 × 1 mm is also used for magnetic shielding of otiose magnetic fields from the permanent magnets. The magnetic field simulation, the measurement of the target erosion and the time-averaged ion flux to the target have been investigated (a) without iron cover and no air gap between N-pole and S-pole magnets, (b) with iron cover and no air gap, and (c) with iron cover and 5 mm air gap, respectively. It is found that the iron covers suppress the horizontal magnetic flux density and the copper target utilization percentage increases from 74.15% to 87.49%. Moreover, by decreasing the air gap between the shielded magnets, the copper target utilization percentage rises from 83.85% to 87.49%. The target utilization as well as the time-averaged ion flux to the target is optimum for case (b). [ABSTRACT FROM AUTHOR]