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• A cross-scale piezoelectric positioning platform was proposed for semiconductor inspection. • Three drive modes were utilized to meet millimeter, micrometer, and nanometer positioning requirements. • The compliance matrix method was utilized to improve modeling accuracy and efficiency. • The feasibility of the three drive methods at different scales was experimentally validated. • The practical application of the proposed cross-scale drive in semiconductor inspection has been proven. To address the challenge of achieving extensive travel and high precision in semiconductor inspection, this study proposes a novel 2-DOF cross-scale piezoelectric positioning platform. In semiconductor inspection, the platform utilizes elliptical, stick-slip, and direct-push drive modes to meet the motion requirements at millimeter, micrometer, and nanometer scales. By applying defined electrical signals to the piezoelectric units, the platform can achieve high-speed continuous mode (HCM) for the millimeter scale, low-speed stepping mode (LSM) for the micrometer scale, and high-precision positioning mode (HPM) for the nanometer scale. Theoretical analysis and simulations were performed to design the flexible stator of the platform, and its dynamic characteristics were analyzed. A prototype was fabricated, assembled, and experimentally tested to investigate the mechanical performance of the proposed platform. The results show that the prototype successfully realizes cross-scale motion in the three modes: achieving a maximum no-load speed of 62.47 mm/s in HCM, a low-speed stepping motion of 14.62 μm/s in LSM, and high-precision positioning with a resolution of 25 nm within a range of ±21 μm in HPM. Through the flexible switching and cooperation of the three drive modes, the platform can quickly approach the target at millimeter speed, further approach with micrometer step motion, and finally achieve nanometer precision positioning. Finally, the positioning platform was successfully applied to inspect semiconductor devices for defect inspection. This study explores a novel cross-scale driving method for piezoelectric positioning platforms, which provides a new approach for precision manipulation research related to semiconductor component inspection. [Display omitted] [ABSTRACT FROM AUTHOR]

• A hollow-type XY piezoelectric positioning platform with three-stage flexible lever amplification is proposed. • This platform enhanced space utilization, output performance for compact, and high-performance applications. • The three-stage flexible lever amplification structure increases the output displacement of the piezoelectric stack. • The leaf-shaped flexible beams can efficiently suppress mutual coupling motion, leading to high precision positioning. • The platform's versatility and effectiveness were confirmed in optical microscopy of minute electronic components. To enhance space efficiency and reduce the planar dimensions of the piezoelectric platform, propose an innovative three-stage flexible lever hollow XY piezoelectric platform powered by piezoelectric stack. This paper details the platform's design configuration and operational principles. Analyze and optimize the platform's static and dynamic characteristics using matrix-based compliance modeling and finite element methods. The platform measures 39 mm × 39 mm × 40 mm with a hollow diameter of 29 mm × 29 mm × 40 mm and weighs 60.12 g. An array of experiments was performed to evaluate the prototype platform's performance. Experimental results revealed that the platform's motion ranges are 30.76 μm and 29.79 μm, the cross-coupling ratios are 2.02% and 2.26%, the hysteresis ratios are approximately 5.48% and 5.56%, the displacement resolution are less than 29.3 nm and 31.4 nm, and the carrying load exceeds 1 kg, all measured in the X-axis and Y-axis respectively. Moreover, after installing a simulated laser generator load, achieved square and elliptical motion trajectories by exciting different signals. The study further highlights the successful application of the novel piezoelectric positioning platform for precise motion positioning and inspection of minute electronic components under an optical microscope, signifying its potential to enhance detection and sorting processes in the electronics industry. When compared with earlier piezoelectric positioning platforms, proposed platform not only provides a superior space utilization rate but also exhibits enhanced performance. In the future, the platform will be used for high performance scanning and optical system tracking for atomic force microscopes. [Display omitted] [ABSTRACT FROM AUTHOR]

• A novel actuation method based on embedded piezoelectric actuator (EPA) is designed and proposed. • The proposed EPA overcomes the technical difficulties of large additional mass and volume, and low control effectiveness. • A novel modeling using the transfer matrix method improves the computational accuracy and the evaluation efficiency. • The correctness of the modeling and the feasibility of the design are verified by case studies. • Another case study using the control system validates the application of the EPA for vibration control of solar wings. The solar wing is a vital energy component of spacecraft. It often faces challenges from vibrations and deformations during orbit, impacting spacecraft pointing accuracy and operational performance. To address these issues, a novel actuation method based on embedded piezoelectric actuator (EPA) is proposed in this study, which overcomes the technical difficulties of large additional mass and volume, and low control effectiveness. Firstly, a sandwich stacked EPA is meticulously designed and embedded into the connecting rod based on comprehensive analysis. Secondly, a novel modeling using the transfer matrix method improves the computational accuracy and the evaluation efficiency. Finally, a prototype of the EPA is fabricated, and the measurement system is constructed. The correctness of the modeling and the feasibility of the design are verified by case studies. The applications of the EPA for active vibration control are verified by additional case studies of the connecting rod and the scaled solar wing prototype, respectively. The results reveal the amplitude reduction rates at the natural frequency are 97.36% and 97.48% in the XOZ plane and YOZ plane, respectively, with residual disturbances limited to only 0.03 mm. The exemplary outcomes solidify the exceptional performance of the proposed embedded piezoelectric actuation method for the active vibration control of solar wings. This novel method holds great promise for enhancing spacecraft stability and performance. [Display omitted] [ABSTRACT FROM AUTHOR]