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1. A flexible and wearable dual band bio-based antenna for WBAN applications

Author

Sid, Abdelghafour, Cresson, Pierre-Yves, Joly, Nicolas, Braud, Flavie, Lasri, Tuami, Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Université catholique de Lille (UCL)-Université catholique de Lille (UCL), Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN (MITEC - IEMN), Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Unité Transformations et Agroressources [Université d'Artois] (UTA), Université d'Artois (UA)-Transformations et Agro-ressources (UT&A), UniLaSalle-UniLaSalle, Centrale de Micro Nano Fabrication - IEMN (CMNF - IEMN), The authors would like to thank Mr. Gauthier DELBARRE, Pierre LALY and Christophe BOYAVAL, for their technical help. -> PCMP C2EM, Renatech Network, PCMP C2EM, Renatech Network, and CMNF

Subjects
[CHIM.POLY]Chemical Sciences/Polymers, Flexible antenna, [CHIM.ANAL]Chemical Sciences/Analytical chemistry, [CHIM.ORGA]Chemical Sciences/Organic chemistry, Biosourced material, Green electronics, Wearable antenna, [CHIM.MATE]Chemical Sciences/Material chemistry, Electrical and Electronic Engineering, Biocompatible antenna, [SPI.GCIV.EC]Engineering Sciences [physics]/Civil Engineering/Eco-conception, [SPI.MAT]Engineering Sciences [physics]/Materials
Abstract

International audience; This paper presents a flexible and wearable (on-body) dual band antenna operating in two Industrial, Scientific and Medical (ISM) frequency bands. The central frequencies selected are equal to 2.45 GHz and 5.8 GHz. In order to make the antenna suitable for Wireless Body Area Network (WBAN) applications, it is fabricated on a flexible biopolymer called cellulose laurate (CL). The proposed antenna, that has been designed and optimized on ANSYS HFSS, is realized using a process based on copper adhesive tape and laser structuring. The characterization of the antenna in terms of reflection coefficient, gain and radiation patterns shows a good agreement with the simulation data. Compared to state-of-the-art antennas, the investigated solution demonstrates competitive results. The proposed antenna also features stable performance under bending conditions and the estimated specific absorption rate (SAR) is well below the limits defined by international standards. All these results suggest that the proposed antenna is very well suited for potential wearable applications and is a step towards fully green electronics.

Published
2022
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2. Sputtered tungsten nitride films as pseudocapacitive electrode for on chip micro-supercapacitors

Author

Pascal Roussel, Thierry Brousse, Didier Stiévenard, Saliha Ouendi, Kevin Robert, Christophe Lethien, Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Centrale de Micro Nano Fabrication - IEMN (CMNF - IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Circuits Systèmes Applications des Micro-ondes - IEMN (CSAM - IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Institut TELECOM/TELECOM Lille1, Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Physique - IEMN (PHYSIQUE - IEMN), Institut des Matériaux Jean Rouxel (IMN), Université de Nantes - UFR des Sciences et des Techniques (UN UFR ST), Université de Nantes (UN)-Université de Nantes (UN)-Ecole Polytechnique de l'Université de Nantes (EPUN), Université de Nantes (UN)-Université de Nantes (UN)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Unité de Catalyse et Chimie du Solide - UMR 8181 (UCCS), Université d'Artois (UA)-Centrale Lille-Institut de Chimie du CNRS (INC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS), Réseau sur le stockage électrochimique de l'énergie (RS2E), Université de Nantes (UN)-Aix Marseille Université (AMU)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Collège de France (CdF (institution))-Université de Picardie Jules Verne (UPJV)-Ecole Nationale Supérieure de Chimie de Montpellier (ENSCM)-Ecole Nationale Supérieure de Chimie de Paris - Chimie ParisTech-PSL (ENSCP), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Université de Pau et des Pays de l'Adour (UPPA)-Institut de Chimie du CNRS (INC)-Université de Montpellier (UM)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA)-Université Grenoble Alpes (UGA), AcknowledgmentThis research is financially supported by the ANR within theDENSSCAPIO project (ANR-17-CE05-0015-02). The authors also want tothank the French network on electrochemical energy storage (RS2E) forthe financial support. The French RENATECH network is greatlyacknowledged for the use of microfabrication facilities. Associated Professor Dr Christophe Lethien wants to thank Professor Thierry Brousseand the 'Institut des Materiaux de Nantes' for welcoming him as avisiting professor in 2018. Jean Louis Codron and Xavier Wallart aregreatly acknowledged for the XPS measurements., Renatech Network, ANR-17-CE05-0015,DENSSCAPIO,Supercondensateurs nanostructurés tout-solides pour stockage d'énergie plus dense et plus sûr(2017), Centrale de Micro Nano Fabrication - IEMN (CMNF-IEMN), Physique-IEMN (PHYSIQUE-IEMN), Université de Nantes (UN)-Université de Nantes (UN)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Ecole Polytechnique de l'Université de Nantes (EPUN), Université de Nantes (UN)-Université de Nantes (UN), and Centrale Lille Institut (CLIL)-Université d'Artois (UA)-Centrale Lille-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Lille

Subjects
Materials science, Energy Engineering and Power Technology, 02 engineering and technology, 010402 general chemistry, 01 natural sciences, Capacitance, law.invention, [SPI]Engineering Sciences [physics], chemistry.chemical_compound, law, Microelectronics, General Materials Science, Wafer, Pseudocapacitance, Micro-supercapacitor, ComputingMilieux_MISCELLANEOUS, Supercapacitor, Renewable Energy, Sustainability and the Environment, business.industry, Sputtering, Sputter deposition, 021001 nanoscience & nanotechnology, 0104 chemical sciences, Capacitor, chemistry, Electrode, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Tungsten nitride, Optoelectronics, AFM, 0210 nano-technology, business
Abstract

International audience; AbstractMicro-supercapacitors, a class of miniaturized electrochemical capacitors, are an attractive solution to power smart and connected sensors for Internet of Thing (IoT) applications. Unfortunately, to propose on chip micro-supercapacitors with high technological readiness level, the deposition of electrode materials on large-scale substrate is challenging from microelectronic industry point of view. To fulfill the IoT needs and semiconductor industry requirements, the sputtering deposition of transition metal nitride was investigated in the framework of this paper. Bi-functional tungsten nitride films were sputtered on silicon wafer and were investigated both as a current collector and as an electrode material. Atomic Force Microscopy technique was used to evaluate the specific surface of the sputtered films. 7.9 μm-thick W2N films exhibits a specific surface of 75 cm2 per cm2 footprint area and thus it exhibits capacitance values up to 0.55 F cm−2 and more than 700 F cm−3 in 1 M KOH aqueous electrolyte.

Published
2019
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3. Asymmetric micro-supercapacitors based on electrodeposited Ruo2 and sputtered VN films

Author

Christophe Lethien, Thierry Brousse, Kevin Robert, Bouchra Asbani, Pascal Roussel, Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Université catholique de Lille (UCL)-Université catholique de Lille (UCL), Réseau sur le stockage électrochimique de l'énergie (RS2E), Université de Nantes (UN)-Aix Marseille Université (AMU)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Collège de France (CdF (institution))-Université de Picardie Jules Verne (UPJV)-Ecole Nationale Supérieure de Chimie de Montpellier (ENSCM)-Ecole Nationale Supérieure de Chimie de Paris - Chimie ParisTech-PSL (ENSCP), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Université de Pau et des Pays de l'Adour (UPPA)-Institut de Chimie du CNRS (INC)-Université de Montpellier (UM)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA)-Université Grenoble Alpes (UGA), Circuits Systèmes Applications des Micro-ondes - IEMN (CSAM - IEMN ), Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Unité de Catalyse et Chimie du Solide - UMR 8181 (UCCS), Université d'Artois (UA)-Centrale Lille-Institut de Chimie du CNRS (INC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS), Institut des Matériaux Jean Rouxel (IMN), Université de Nantes - UFR des Sciences et des Techniques (UN UFR ST), Université de Nantes (UN)-Université de Nantes (UN)-Ecole Polytechnique de l'Université de Nantes (EPUN), Université de Nantes (UN)-Université de Nantes (UN)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), This research benefitted from the financial support of the ANR within the DENSSCAPIO project (ANR-17-CE05–0015–02). The authors would also like to thank the ANR STORE-EX and the RS2E for their financial support. The RENATECH network receives our utmost gratitude. Chevreul Institute (CNRS FR 2638), Ministère de l’Enseignement Supérieur et de la Recherche, Région Hauts de France and FEDER are acknowledged for supporting and funding XRD facilities., RS2E, Renatech Network, CMNF, ANR-17-CE05-0015,DENSSCAPIO,Supercondensateurs nanostructurés tout-solides pour stockage d'énergie plus dense et plus sûr(2017), ANR-10-LABX-0076,STORE-EX,Laboratory of excellency for electrochemical energy storage(2010), Université de Picardie Jules Verne (UPJV)-Institut de Chimie du CNRS (INC)-Aix Marseille Université (AMU)-Université de Pau et des Pays de l'Adour (UPPA)-Université de Nantes (UN)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Sorbonne Université (SU)-Ecole Nationale Supérieure de Chimie de Paris - Chimie ParisTech-PSL (ENSCP), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Collège de France (CdF (institution))-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA)-Université Grenoble Alpes (UGA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Ecole Nationale Supérieure de Chimie de Montpellier (ENSCM), Centrale Lille Institut (CLIL)-Université d'Artois (UA)-Centrale Lille-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Lille, Université de Nantes (UN)-Université de Nantes (UN)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Ecole Polytechnique de l'Université de Nantes (EPUN), Université de Nantes (UN)-Université de Nantes (UN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), CNRS, Centrale Lille, ENSCL, ISEN, Institut Catholique Lille, Univ. Artois, Univ. Valenciennes, Université de Lille, Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520, and Unité de Catalyse et Chimie du Solide (UCCS) - UMR 8181

Subjects
Materials science, Vanadium nitride, Energy Engineering and Power Technology, 02 engineering and technology, 010402 general chemistry, 01 natural sciences, 7. Clean energy, Capacitance, Ruthenium oxide, vanadium nitride, chemistry.chemical_compound, asymmetric micro-supercapacitors, Sputtering, General Materials Science, Thin film, Electrochemical potential, Power density, Supercapacitor, Renewable Energy, Sustainability and the Environment, business.industry, [SPI.NRJ]Engineering Sciences [physics]/Electric power, hydrous ruthenium oxide, [CHIM.MATE]Chemical Sciences/Material chemistry, 021001 nanoscience & nanotechnology, 0104 chemical sciences, thin films, chemistry, electrodeposition, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, sputtering, 0210 nano-technology, business
Abstract

International audience; Research on micro-supercapacitors remains one of the most important activities in the area of electrochemical energy storage for powering smart and miniaturized electronic devices. Here we design an asymmetric micro-supercapacitor (A-MSC) combining sputtered vanadium nitride film (VN) and electrodeposited hydrous ruthenium oxide (hRuO2) film. Taking advantage of their complementary electrochemical potential windows in 1 M KOH electrolyte, the A-MSC achieves a cell voltage up to 1.15 V, associated to high specific capacitance values for the device (≈ 100 mF cm−2). The energy density of this asymmetric VN / hRuO2 micro-supercapacitor reaches 20 µWh cm−2 at a power density of 3 mW cm−2. Taking benefit from the asymmetric configuration, a 5-fold enhancement factor in energy density is demonstrated for the VN / hRuO2 asymmetric micro-supercapacitor as compared to symmetric VN / VN and hRuO2 / hRuO2 microdevices.

Published
2021
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4. High Al-content AlGaN channel high electron mobility transistors on silicon substrate

Author

J. Mehta, I. Abid, J. Bassaler, J. Pernot, P. Ferrandis, M. Nemoz, Y. Cordier, S. Rennesson, S. Tamariz, F. Semond, F. Medjdoub, WIde baNd gap materials and Devices - IEMN (WIND - IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Université catholique de Lille (UCL)-Université catholique de Lille (UCL), Semi-conducteurs à large bande interdite (NEEL - SC2G), Institut Néel (NEEL), Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA), Université de Toulon (UTLN), Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA), Université Nice Sophia Antipolis (1965 - 2019) (UNS), COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UCA), EasyGaN, partially supported by the French RENATECH network, Renatech Network, CMNF, ANR-11-LABX-0014,GANEX,Réseau national sur GaN(2011), ANR-22-CE05-0028,ACTION,Nouveau transistors à canaux AlGaN pour les applications à haute tension(2022), WIde baNd gap materials and Devices - IEMN [WIND - IEMN], Semi-conducteurs à large bande interdite [NEEL - SC2G], Université de Toulon [UTLN], and Centre de recherche sur l'hétéroepitaxie et ses applications [CRHEA]

Subjects
[SPI]Engineering Sciences [physics], AlGaN-on-Si AlGaN channel UWBG HEMT
Abstract

International audience; The rapidly increasing power demand, downsizing of power electronics and material specific limitation of silicon has led to development of AlGaN/GaN heterostructures. Commercial GaN power devices are best available for radio frequency (RF) and high voltage switching applications. Emerging Al x Ga 1-x N channel based heterostructures are promising to enhance the limits of next generation high voltage GaN power switching devices. In this work, we report on the study of electrical performance of AlGaN channel HEMTs-on-Silicon using various Al content. The fabricated devices exhibited outstanding buffer breakdown electric field above 2.5 MV/cm considering the submicron thin heterostructures grown on silicon substrate. Furthermore, we also experimentally demonstrate high temperature operation of fabricated AlGaN channel HEMTs.

Published
2023
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5. Boron-doped carbon nanowalls for fast and direct detection of cytochrome C and ricin by matrix-free laser desorption/ionization mass spectrometry

Author

I.S. Hosu, M. Sobaszek, M. Ficek, R. Bogdanowicz, Y. Coffinier, Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Université catholique de Lille (UCL)-Université catholique de Lille (UCL), NanoBioInterfaces - IEMN (NBI - IEMN), Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Gdańsk University of Technology (GUT), The Centre National de la Recherche Scientifique (CNRS), University of Lille , Hauts-de-France region and the CPER 'Photonics for Society' from France are all acknowledged for their financial support. I.S.H. acknowledges the University of Lille and DGA (Direction générale de l'armement, France) for PhD funding. The Renatech Network (France) is also acknowledged for providing great support and technical assistance as well as the National Center for Research and Development (Poland) under grant number NOR/POLNOR/UPTURN/0060/2019 . This work was also supported by grants of the Ministry of Research, Innovation and Digitization, CNCS - UEFISCDI (Romania) , project number PN–III–P1-1.1-PD-2021-0798 , within PNCDI III., Renatech Network, and CMNF

Subjects
Ricin B chain, History, Mass spectrometry, Polymers and Plastics, Lasers, Cytochrome C, Matrix-free laser desorption/ionization, Cytochromes c, Reproducibility of Results, Ricin, Carbon, Industrial and Manufacturing Engineering, Boron-doped carbon nanowalls, Analytical Chemistry, Biological samples, [SPI]Engineering Sciences [physics], Spectrometry, Mass, Matrix-Assisted Laser Desorption-Ionization, Business and International Management, Boron
Abstract

International audience; Detecting proteins via surface assisted laser desorption/ionization mass spectrometry (SALDI-MS) method is still highly challenging, and only few examples of nanomaterials have been demonstrated to perform such detection so far. In this study, carbon nanowalls (CNWs), vertically aligned graphene sheet-based materials, presenting specific morphology, dimensions, and boron doping levels have shown improved performances for both qualitative and quantitative detection of Cytochrome C under optimized experimental conditions. Boron doped carbon nanowalls (B-CNWs) with a [B]/[C] ratio of 5000 ppm and growing time of 4 h have shown the best performance in terms of signal intensity and reliability. Then, the detection of ricin, a ribosomal-inhibiting protein (RIP) classified as category B bioterrorism agent by CDC (Centre of Disease and Control and Prevention), was performed. For the first time, direct SALDI-MS detection of ricin B chain was reported without tedious sample preparation steps or database interrogation, and results were obtained within few minutes and a limit of detection (LOD) of 0.5 pmol/μl was obtained. Thanks to the introduction of galactosamine residues on B–CNW, we were able to selectively detect ricin B chain protein in complex media such as serum and soft drinks with enhanced signal intensity. B-CNWs are not toxic and are adaptable to any commercial MALDI-TOF mass spectrometer, showing their great potential as SALDI based materials.

Published
2023
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