1. The controllable deposition of large area roll-to-roll sputtered ito thin films for photovoltaic applications
- Author
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Mehtap Ozdemir, Zemzem Uyanik, Fulya Türkoğlu, H. Koseoglu, Lutfi Ozyuzer, Gulnur Aygun, Yasemin Demirhan, İSTE Bilim ve Teknoloji Uygulama ve Araştırma Merkezi (İSTE-BTM), Mühendislik ve Doğa Bilimleri Fakültesi -- Metalurji ve Malzeme Mühendisliği Bölümü, Köseoğlu, Hasan, and Türkoğlu, Fulya
- Subjects
02 engineering and technology ,Indium ,deposition ,Roll-to-roll processing ,0202 electrical engineering, electronic engineering, information engineering ,Organic solar-cells ,Optical emission spectroscopies (OES) ,Deposition (phase transition) ,Transparent conducting oxides ,0601 history and archaeology ,Green & Sustainable Science & Technology ,Roll to Roll ,Optical properties ,Plastic bottles ,060102 archaeology ,partial pressure ,Indium Tin Oxide | ITO (semiconductor) | Oxide Film ,06 humanities and the arts ,Energy gap ,photovoltaic system ,ITO thin films ,Optoelectronics ,Tin-oxide-films ,Polyethylene terephthalates (PET) ,electrical resistivity ,spectroscopy ,systemsFigure of merit (FOM) ,Materials science ,Energy & Fuels ,Optical films ,Band gap ,Thin films ,020209 energy ,Transparent conducting oxides (TCO) ,substrate ,Figure of merit (FOM) ,Light emission ,Figure ,Fabrication ,Electrical resistivity and conductivity ,Improvement ,OLED ,Figure of merit ,Thin film ,Dependence ,Electrical-properties ,Large area roll to roll sputtering ,Flexible electrodes for photovoltaics ,Renewable Energy, Sustainability and the Environment ,business.industry ,Conductive films ,electrode ,Sputter deposition ,DC magnetron sputtering systems ,Photovoltaics ,Optical emission spectroscopy ,Oxygen partial pressure ,oxide ,business - Abstract
International Conference on Photovoltaic Technologies (PVCon) -- JUL 04-06, 2018 -- Middle E Tech Univ, Culture & Convent Ctr, Ankara, Turkey, WOS: 000499762300011, In the present study, using a large area roll-to-roll DC magnetron sputtering system deposition of ITO thin films on polyethylene terephthalate (PET) substrates were achieved. In order to investigate the effect of growth conditions on the film properties all through the deposition process, optical emission spectroscopy (OES) analysis have been accomplished in a governable way. The consequences of Oxygen partial pressure and film thickness on electrical, and optical properties of the films were determined. It was shown that the intensity of optical emission peaks are subjected to the discharge power and as well as the O-2/Ar flow ratio. Large area, uniform ITO films with relatively high transparency and low electrical resistivity (R(2)(
- Published
- 2020
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