1. Corrosion of thin, magnetron sputtered Nb 2 O 5 films
- Author
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Mara Cristina Lopes de Oliveira, Edval Gonçalves de Araújo, Guilherme Altomari Geribola, Renato Altobelli Antunes, Guilherme Scheidt, and Marina Fuser Pillis
- Subjects
010302 applied physics ,Materials science ,General Chemical Engineering ,Metallurgy ,Niobium ,chemistry.chemical_element ,02 engineering and technology ,General Chemistry ,Substrate (electronics) ,Sputter deposition ,021001 nanoscience & nanotechnology ,01 natural sciences ,Dielectric spectroscopy ,Corrosion ,chemistry ,0103 physical sciences ,Cavity magnetron ,Niobium oxide ,General Materials Science ,Thin film ,0210 nano-technology - Abstract
Niobium oxide based thin films were deposited on AISI 316 stainless steel substrates using reactive DC magnetron sputtering. Structure, composition and corrosion resistance of the niobium oxide films were studied. The corrosion behavior of the specimens was evaluated by electrochemical impedance spectroscopy (EIS) and potentiodynamic polarization. The concentration of niobium and oxygen in the films was obtained by Rutherford backscattering spectroscopy (RBS). The film structure was analyzed by X-ray diffractometry. The corrosion resistance of the substrate was improved by the Nb2O5 layers. The best protective performance was achieved for the deposition time of 15 min.
- Published
- 2016
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