1. Polymer coated silicon microring device for the detection of sub-ppm volatile organic compounds
- Author
-
Riazul Raziq, Suresh Valiyaveettil, Pyng Lee, Qing Liu, Jack Sheng Kee, Jaehoon Chung, Mi Kyoung Park, and Dongliang Fu
- Subjects
Langmuir ,Materials science ,Silicon ,Analytical chemistry ,chemistry.chemical_element ,02 engineering and technology ,01 natural sciences ,Styrene ,chemistry.chemical_compound ,Resonator ,Materials Chemistry ,Electrical and Electronic Engineering ,Absorption (electromagnetic radiation) ,Instrumentation ,Isoprene ,chemistry.chemical_classification ,010401 analytical chemistry ,Doping ,Metals and Alloys ,Polymer ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,0104 chemical sciences ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,chemistry ,0210 nano-technology - Abstract
We present a polymer-coated silicon microring resonator to detect volatile organic compounds (VOC) gases. Absorption of VOC gases into the polymer alters the refractive index around the microring, which enables quantification of absorbed gases as a resonance wavelength shift in the resonator. Two different polymers, hyperbranched polyesteramid and poly(2-vinyl pyridine), are tested as the absorption layers on the highly sensitive (80 nm/RIU and 10,000 Q-factor) silicon microring resonator. The sensing responses to VOC gases are characterized by flowing four different gases: styrene, acetone, toluene, and isoprene, in a wide range of concentration (sub-ppm to 100 ppm range). The hyperbranched polyesteramid coated sensor shows the highest sensitivity to styrene. Similarly, Poly(2-vinyl pyridine) coated device exhibits sensitive responses to styrene and acetone. From experiments with a wide range of gas concentrations, we observe that the sensors have two distinguished characteristics; linear and non-linear response with respect to gas concentration. To account for it, a dual mode sensing mechanism is proposed; Langmuir mode (doping effect) in the low concentration (
- Published
- 2018
- Full Text
- View/download PDF