1. In-situ curvature measurements of AlInN/GaN distributed Bragg reflectors during growths containing substrate temperature ramping steps
- Author
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Motoaki Iwaya, Isamu Akasaki, Sho Iwayama, Kei Hiraiwa, Tetsuya Takeuchi, Satoshi Kamiyama, and Wataru Muranaga
- Subjects
010302 applied physics ,In situ ,Diffraction ,Materials science ,business.industry ,Wafer curvature ,02 engineering and technology ,Substrate (electronics) ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Mole fraction ,Epitaxy ,Curvature ,01 natural sciences ,Inorganic Chemistry ,0103 physical sciences ,Materials Chemistry ,Optoelectronics ,0210 nano-technology ,business ,Layer (electronics) - Abstract
We developed a model for in-situ wafer curvature values of AlInN/GaN distributed Bragg reflectors (DBRs) and determined InN mole fractions in the DBRs with the model. In order to develop the model, we experimentally investigated contributions of substrate temperature ramping and a GaN growth to changes in the in-situ curvature values during the AlInN/GaN DBR growth. We found that an increase of curvature changes at the substrate temperature ramping steps was explained by an increase of the total epitaxial layer thicknesses. Another finding was that strain in the GaN layers at the GaN layer growth steps was almost zero. Finally, we determined the InN mole fractions in the AlInN layers by using the model, showing excellent agreements with the values estimated from ex-situ X-ray diffraction measurements. The model reveals not only the entire in-situ curvature change profile but also the InN mole fraction under the precisely lattice-matched condition of AlInN/GaN DBRs.
- Published
- 2020
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