1. Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001)
- Author
-
Hiroshi Kawarada, Toshio Sasaki, Atsushi Hiraiwa, Shozo Kono, and Masafumi Inaba
- Subjects
Surface (mathematics) ,Materials science ,Hydrogen ,chemistry.chemical_element ,Nanotechnology ,02 engineering and technology ,engineering.material ,01 natural sciences ,0103 physical sciences ,Materials Chemistry ,Electrical and Electronic Engineering ,Composite material ,Electrical conductor ,Ohmic contact ,Sheet resistance ,010302 applied physics ,Mechanical Engineering ,Contact resistance ,Diamond ,General Chemistry ,021001 nanoscience & nanotechnology ,Electronic, Optical and Magnetic Materials ,chemistry ,Electrode ,engineering ,0210 nano-technology - Abstract
The sheet resistance ( R sk ) underneath ohmic Au-electrodes on hydrogen-terminated surface-conductive diamond (001) surfaces was examined by a special current-voltage measurement. It has been found that R sk is about ~ 200 times larger than the sheet resistance, R sh , in the open areas without Au-electrodes. The specific contact resistance, R C , of ohmic Au-electrodes on H-terminated surface-conductive diamonds as determined by linear transmission line models must be corrected accordingly. As the results of this, R C is suggested to be of the order of 1 × 10 − 3 – 1 × 10 − 4 Ωcm 2 .
- Published
- 2017