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The strain sensitivity, i.e. the resistivity change due to mechanical strain of thin composite nano-cermet films of Pt–SiO2 was investigated. We prepared films with a thickness of 400 nm by means of co-sputtering processes at substrate temperatures around 400 °C. The specimens respond to uniform strain (ɛ = 0.2‰) with gauge factors up to 18. These gauge factors remained high at least up to 250 °C in air and also after further annealing up to 600 °C in vacuum. Therefore we state these functional films might be suitable for high temperature pressure and force sensors. The films have a relatively high film resistivity of some MΩ/sq and exhibit temperature coefficients of resistance (TCR) in the range of −2000 ppm/K up to −600 ppm/K. X-ray diffraction revealed a single crystalline fcc platinum phase while transmission electron microscopy proved a typical granular structure of the films. Pt-clusters sized 5–10 nm are embedded in an amorphous insulating matrix of silica. The composition of such nano-cermet films displaying high gauge factors is approx. 40 at% Pt, 20 at% Si and 40 at% of O.

Nickel containing amorphous hydrogenated carbon (Ni:a-C:H) thin films prepared by reactive sputtering have a high potential for use as piezoresistive sensors. Investigations by means of X-ray diffraction (XRD), transmission electron microscopy, energy-dispersive X-ray spectroscopy, and magnetic characterizations indicate that sputtering parameters and heat treatment influence the film composition, the microscopic structure, and some relevant macroscopic physical properties. The films are heterogeneous in nature and consist of either nanometer sized hcp nickel, nickel carbide (these phases being indistinguishable by XRD), or fcc nickel clusters encapsulated by graphite-like carbon shells. The nature of the metal clusters in the thin films has a strong effect on its magnetic properties. For approximately 55 at.% Ni the electrical resistivity of the film is nearly temperature independent over a broad temperature range from 100 K to 400 K. The strain sensitivity, with a gauge factor of 20, is up to ten times higher than conventional temperature independent strain sensitive films. Compared to industry standard NiCr functional layers used for pressure sensors, Ni:a-C:H films provide a ten fold higher output signal.