1. Total dose effects on Microelectromechanical Systems (MEMS): accelerometers
- Author
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C.I. Lee, James Lyke, C.E. Barnes, A.H. Johnston, and William C. Tang
- Subjects
Microelectromechanical systems ,Nuclear and High Energy Physics ,Materials science ,business.industry ,Biomedical Engineering ,Molecular ,Accelerometer ,Atomic ,Nuclear & Particles Physics ,Atomic, Molecular, Nuclear, Particle and Plasma Physics ,Other Physical Sciences ,Surface micromachining ,Particle and Plasma Physics ,Nuclear Energy and Engineering ,Total dose ,Optoelectronics ,Nuclear ,Electrical and Electronic Engineering ,business ,Radiation response - Abstract
Microelectromechanical sensors, ADXL50 and XMMAS40G accelerometers which are fabricated with surface micromachining techniques are characterized for their total dose radiation response. Different failure mechanisms were observed when the sensor element or the whole device was irradiated.
- Published
- 1996
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