1. Lamb waves sensor in liquid media utilising higher order quasi-longitudinal S5 and S6 modes
- Author
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Hamidullah, Muhammad, Rezzag, Nassim, Elie-Caille, Céline, Leblois, Thérèse, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC), and Femto-st, MN2S
- Subjects
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[SPI.ACOU] Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,[SPI.MAT] Engineering Sciences [physics]/Materials ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,[SPI.MAT]Engineering Sciences [physics]/Materials - Abstract
International audience; Higher order quasi-longitudinal (QL) Lamb waves have been reported for sensor application in liquid media at higher thickness-to-wavelength (h/l) ratio than the fundamental symmetric modes, with the main advantage of having higher operating frequency and reduction in the total size of the device without reducing the plate thickness. However, the trade-off in the reduction of electromechanical coupling coefficient (K2) is a hinder in utilizing QL Lamb waves with higher order number. Here we performed finite element simulation and verified experimentally the possibility of utilising S5 and S6 QL Lamb wave modes in liquid media based on two-port delay line device on a thick GaAs substrate. While the K2 values are lower for QL modes at higher order number, the signal amplitude of S21 parameter at the resonant frequency is still distinguishable from the noise floor. The result demonstrates the feasibility of higher order modes at higher h/l ratio for sensor in liquid media, thus allowing further reduction in the wavelength and the total size of the sensor device.
- Published
- 2021