1. BenzoCycloButene-based in-Package Substrate Integrated Waveguides for sub-THz Applications
- Author
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Frédéric Aniel, Philippe Ferrari, Nicolas Zerounian, Loic Vincent, Florence Podevin, Giuseppe Acri, A.-S. Grimault-Jacquin, Luigi Boccia, Emmanuel Pistono, BEN TITO, Laurence, Laboratoire de Radio-Fréquence et d'Intégration de Circuits (RFIC-Lab ), Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA)-Université Grenoble Alpes (UGA), Dipartimento di Ingegneria Informatica, Modellistica, Elettronica e Sistemistica [Calabria] (DIMES), Università della Calabria [Arcavacata di Rende] (Unical), Centre de Nanosciences et de Nanotechnologies (C2N), Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Centre Interuniversitaire de Micro-Electronique (CIME), and Institut National Polytechnique de Grenoble (INPG)
- Subjects
Materials science ,[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,packaging ,02 engineering and technology ,law.invention ,chemistry.chemical_compound ,law ,Benzocyclobutene ,0202 electrical engineering, electronic engineering, information engineering ,frequency measurement ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,substrates ,attenuation ,passive circuit ,Electronic circuit ,business.industry ,Attenuation ,020208 electrical & electronic engineering ,Q-factor ,020206 networking & telecommunications ,CMOS ,chemistry ,PACS 85.42 ,Attenuation coefficient ,Q factor ,Interposer ,Optoelectronics ,attenuation measurement ,business ,Waveguide - Abstract
International audience; This paper introduces an experimental characterization of substrate integrated waveguide (SIW) components integrated in a benzocyclobutene-based interposer for WR10-band applications. High performance SIWs were experimentally validated, with a measured attenuation constant of 0.39 dB/mm and a quality factor of 27 at 90 GHz. The attenuation constant remains equal to 0.4 dB/mm between 85 GHz and 110 GHz and the quality factor reaches 40 in the upper end of the band. These results show the benefits offered by using benzocyclobutene 3D packaging for the realization of high performance passive circuits with lower cost and higher electrical performance as compared to standard CMOS technologies and concurrent packaging technologies.
- Published
- 2021