1. Non-Collocated Displacement Sensing by Semiconductor Strain Gauges in Differentially Piezo-Driven Nanopositioners
- Author
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Stephane Regnier, Ali Bazaei, Zhiyong Chen, Mokrane Boudaoud, Massoud Hemmasian Ettefagh, Boudaoud, Mokrane, Sorbonne Université (SU), Institut des Systèmes Intelligents et de Robotique (ISIR), Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), University of Newcastle [Australia] (UoN), Huazhong University of Science and Technology [Wuhan] (HUST), and University of Newcastle [Callaghan, Australia] (UoN)
- Subjects
Acoustics ,Semiconductor strain gauge ,Differential actuation ,[SPI.MECA] Engineering Sciences [physics]/Mechanics [physics.med-ph] ,01 natural sciences ,Displacement (vector) ,[SPI.AUTO]Engineering Sciences [physics]/Automatic ,Piezoelectric actuator ,Stack (abstract data type) ,Calibration ,Electrical and Electronic Engineering ,Instrumentation ,Strain gauge ,Displacement sensor ,Physics ,010401 analytical chemistry ,Nanopositioner ,[SPI.MECA]Engineering Sciences [physics]/Mechanics [physics.med-ph] ,[SPI.TRON] Engineering Sciences [physics]/Electronics ,0104 chemical sciences ,[SPI.TRON]Engineering Sciences [physics]/Electronics ,Transverse plane ,Interferometry ,Piezoresistive sensor ,[SPI.AUTO] Engineering Sciences [physics]/Automatic ,Actuator ,Differential (mathematics) - Abstract
International audience; We address design, implementation, and characterization of semiconductor strain gauges as stage displacement sensors with small footprint for piezo-driven nanopositioners in differential actuation mode. The strain gauges are not collocated with the stage of the nanopositioner. They are attached to piezo stack actuators in both longitudinal and transverse directions. We address two differential configurations for the displacement sensing. The first configuration uses all strain gauges and provides three output signals. Two of them are proportional to the length variations of the piezo actuators, which are considered as conventional non-differential sensing method. The last output in the first configuration is the first proposed differential sensor. In the second configuration, we propose an alternative differential sensor using only the longitudinal strain gauges and a simpler readout circuit. The results indicate that in the differential actuation mode, a differential sensing strategy provides much better accuracy than the conventional non-differential schemes. Using a laser interferometer as an independent collocated sensor for stage displacement, we obtained constant calibration factors both proposed differential sensors and characterized their sensing accuracies.
- Published
- 2021