1. A 3 DOF Model for an Electromagnetic Air Mount.
- Author
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Hyung Tae Kim, CheolHo Kim, SungBok Kang, KangWon Lee, JaeHo Baek, and HyunHee Han
- Subjects
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DEGREES of freedom , *VIBRATION (Mechanics) , *ELECTROMAGNETISM , *ISOLATORS (Engineering) , *SEMICONDUCTORS , *SURFACE plates , *ELECTROMAGNETS - Abstract
A 4 × 4 matrix model with three degrees of freedom is proposed as a means for controlling microvibrations and applied to an electromagnetic isolator. The model was derived from an assumption based on small- and low-frequency vibrations. The coordinates of the 3 DOF was composed of the 4 variables, representing a vertical position, pitch, roll, and a proof term. The coordinates were calculated from the 4 position sensors in the isolator and formulated into a 4 × 4 matrix, which possesses inversive full rank. The electro-magnetic isolator was built for a simulated machine in semiconductormanufacturing and consisted of a heavy surface plate, sensors, amps, a controller, and air springs with electromagnets. The electromagnets are installed in a pneumatic chamber of the individual air spring. The performance of the 3 DOF model was experimented and compared with that of a 1 DOF model in an impact test. The settling time in the result was reduced to 25%. [ABSTRACT FROM AUTHOR]
- Published
- 2012
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