1. Plastic Deformation in Profile-Coated Elliptical KB Mirrors
- Author
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Jun Qian, Raymond Conley, Wing Kam Liu, Lahsen Assoufid, Gene E. Ice, Albert T. Macrander, Chian Liu, Jonathan Z. Tischler, and C. M. Kewish
- Subjects
Materials science ,Article Subject ,Radiation ,engineering.material ,Synchrotron ,law.invention ,Si substrate ,Coating ,law ,Vacuum annealing ,engineering ,Stress relaxation ,Monochromatic color ,Composite material ,Beam (structure) - Abstract
Profile coating has been successfully applied to produce elliptical Kirkpatrick-Baez (KB) mirrors using both cylindrical and flat Si substrates. Previously, focusing widths of 70 nm with 15-keV monochromatic and 80 nm with white beam were achieved using a flat Si substrate. Now, precision elliptical KB mirrors with sub-nm figure errors are produced with both Au and Pt coatings on flat substrates. Recent studies of bare Si-, Au-, and Pt-coated KB mirrors under prolonged synchrotron X-ray radiation and low-temperature vacuum annealing will be discussed in terms of film stress relaxation and Si plastic deformation.
- Published
- 2012
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