1. a-Si:H TFT-Silicon Hybrid Low-Energy X-Ray Detector.
- Author
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Shin, Kyung-Wook and Karim, Karim S.
- Subjects
SILICON radiation detectors ,THIN film transistors ,IMAGE sensors ,X-ray detection ,CRYSTALLOGRAPHY ,EQUIPMENT & supplies - Abstract
Direct conversion crystalline silicon X-ray imagers are used for low-energy X-ray photon (4–20 keV) detection in scientific research applications such as protein crystallography. In this paper, we demonstrate a novel pixel architecture that integrates a crystalline silicon X-ray detector with a thin-film transistor amorphous silicon pixel readout circuit. We describe a simplified two-mask process to fabricate a complete imaging array and present preliminary results that show the fabricated pixel to be sensitive to 5.89-keV photons from a low activity Fe-55 gamma source. This paper presented can expedite the development of high spatial resolution, low cost, direct conversion imagers for X-ray diffraction and crystallography applications. [ABSTRACT FROM PUBLISHER]
- Published
- 2017
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