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1. A novel thin film transistor using double amorphous silicon active layer.

Author

Choi, Jong Hyun, Kim, Chang Soo, Byung Cheon Lim, and Jin Jang

Subjects
*THIN film transistors, *SILICON
Abstract

Presents a study which focused on the fabrication of an off-state leakage thin-film transistor using a chlorine incorporated amorphous silicon stacked active layer. Experimental details; Results and discussion; Conclusions.

Published
1998
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