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1. Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology

Author

Michael Wagner, C. Skupsch, Dirk Rudloff, Jan-Uwe Schmidt, Andreas Elgner, Jörg Heber, Mark Eckert, Matthias Schulze, Detlef Kunze, H. Torlee, Andreas Gehner, Martin Friedrichs, S. Frances, Sebastian Döring, W. Pufe, Christoph Hohle, and Peter Dürr

Subjects
Physics, Optics, Tilt (optics), Pixel, CMOS, business.industry, Scalability, Micro mirror, Process (computing), Actuator, business, Cmos compatible
Abstract

We have developed a novel $\mathbf{512\ x\ 320}$ micro mirror array consisting of 2axis-tip-tilt actuators with $\mathbf{48}\mu\mathbf{m}$ pixel size, allowing a continuous, pure tip-tilt motion up to 3.5° in arbitrary directions, fully calibratable with standard deviations of better than 0.025°. The device is realized in a fully CMOS compatible process with an underlying integrated address circuitry.

Published
2018
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