1. Updated BVD Modeling of AlN-based Solidly Mounted Resonators Working at Cryogenic and High Temperatures : From −160 °C up to 130 °C
- Author
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Lugo Hernández, Eduardo, Collado Gómez, Juan Carlos, Mateu Mateu, Jordi, Carmona Cejas, José Manuel, Mirea, Teona, Olivares Roza, Jimena, Universitat Politècnica de Catalunya. Doctorat en Teoria del Senyal i Comunicacions, Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions, and Universitat Politècnica de Catalunya. CSC - Components and Systems for Communications Research Group
- Subjects
Termometria -- Aparells i instruments ,BVD model ,Low temperatures ,Detectors ,SMRs ,High temperatures ,Temperature measuring instruments ,Enginyeria de la telecomunicació::Processament del senyal::Adquisició i detecció del senyal [Àrees temàtiques de la UPC] ,AlN - Abstract
In this work we theoretically and experimentally assess the behavior of AlN-based Solidly Mounted Resonators (SMR) at cryogenic and high temperatures. This study can be useful for precise behavior prediction of SMR sensors working as gas detectors in the food preservation industry, or the industrial and automotive ones. We have subjected SMRs to temperatures from -160°C up to 130°C in high vacuum conditions (6×10 -7 mBar) and compared their experimental performance to a modelled one. We employed an updated mBVD model that includes low temperatures effects, and we show good accuracy between data. Our SMRs have fairly preserved their quality factors and electromechanical coupling factors at both cryogenic and high temperatures: Qa= 482, Qr = 288 and k eff = 6.30% at -160°C to a Qa = 477, Qr = 265 and k eff = 6.39% at 130°C. This work was supported by the next projects: TEC2017-84817-C2-2-R, TEC2017-88343-C4-2-R, TEC2017-84817-C2-1-R, 2017 SGR-813 and Conacyt-México.
- Published
- 2022
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