1. Analysis of Vibrations of Circular Quartz Crystal Resonators for Sensor Applications
- Author
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Tingfeng Ma, Bernd Neubig, Longtao Xie, Ning Gan, Ji Wang, Zengwen Wu, and Qi Huang
- Subjects
Materials science ,Fabrication ,business.industry ,010401 analytical chemistry ,02 engineering and technology ,Quartz crystal microbalance ,021001 nanoscience & nanotechnology ,01 natural sciences ,0104 chemical sciences ,Vibration ,Crystal ,Resonator ,Electrode ,Optoelectronics ,Gravimetric analysis ,0210 nano-technology ,business ,Quartz - Abstract
With a quartz crystal resonator as the core element, the quartz crystal microbalance (QCM) has been an important sensor for various samples including chemical, biomedical, gas, and liquid with broad applications. The sensing mechanism of QCM is based on the gravimetric effect of samples on vibration frequency of the quartz crystal blank. For accuracy and sensitivity, it is important to have a better estimation of the vibration frequency with the consideration of quartz crystal material, configuration, electrodes, mounting, absorption layer, among other factors. As a result, a thorough study of vibrations of the quartz crystal plate is vital for a good design of the QCM and fabrication processing.
- Published
- 2020
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