1. Oxygen-Plasma Treatment of Sol-Gel Derived Lead Zirconate Titanate Thin Films
- Author
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Cheol Eui Lee, E. R. Park, Eung Kil Kang, S. J. Noh, Ho Kyun Jang, and Sangyeop Lee
- Subjects
Materials science ,Annealing (metallurgy) ,Analytical chemistry ,chemistry.chemical_element ,Condensed Matter Physics ,Lead zirconate titanate ,Ferroelectricity ,Oxygen ,Electronic, Optical and Magnetic Materials ,chemistry.chemical_compound ,chemistry ,Thin film ,Current density ,Perovskite (structure) ,Sol-gel - Abstract
Oxygen-plasma treatment has been introduced for improving electrical characteristics and low-temperature processing of sol-gel derived Pb(Zr x , Ti l m x )O 3 (PZT) thin films. The ferroelectric PZT films with room temperature oxygen-plasma treatment showed enhanced polarization and decreased leakage current densities, as well as much reduced electrical fatigues. Besides, oxygen-plasma treatment at 200°C, following a low-temperature annealing in oxygen at 450°C, gave rise to ferroelectric hysteresis loops, which was explained by the perovskite phase formation starting from the surface layers.
- Published
- 2002
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