Search

Argon and lithium-argon discharges have been created in a multicusp-ECR microwave resonant cavity. A double Langmuir probe has been used to determine discharge characteristics, indicating ion densities of 10/sup 10/-10/sup 11/ cm/sup -3/ and electron temperatures of about 3 eV with operating pressures of 4-20 mtorr and input powers of 100-250 W. Lithium is introduced to the system in the form of lithium chloride or lithium carbonate which is then heated by a background argon discharge allowing dissociation of lithium. The dissociation is evidenced by the observation of strong Li-I lines in the discharge using optical emission spectroscopy. LiCl was found to give a strong Li-I optical signal for about 15 min run time whereas Li/sub 2/CO/sub 3/ gave lower intensity lines, but for about 60 min run time.

Optical emission of the electron-cyclotron resonant (ECR) region of a multicusp microwave resonant cavity plasma source has been imaged onto a two-dimensional charge-coupled device (CCD) camera. The technique provides a real-time diagnostic of the plasma emission around the ECR region within a wavelength region defined by low-bandpass filters.