6 results on '"Shih, Jiaw-Ren"'
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2. 4K Detectors Array for On-Wafer EUV Imaging in Lithography Control Beyond 5-nm Node
3. Polarity and Patterning Effect on Plasma Charging Levels by Metal-Gate Coupled Recorder Arrays
4. Battery-Less Electronic Layer Detectors Array (ELDA) for In-Tool DUV Detection by FinFET CMOS Technology
5. On-Wafer FinFET-Based EUV/eBeam Detector Arrays for Advanced Lithography Processes
6. Plasma Charge Accumulative Model in Quantitative FinFET Plasma Damage
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