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Carrier collection in silicon heterojunction (SHJ) solar cells is usually achieved by doped amorphous silicon layers of a few nanometers, deposited at opposite sides of the crystalline silicon wafer. These layers are often defect-rich, resulting in modest doping efficiencies, parasitic optical absorption when applied at the front of solar cells, and high contact resistivities with the adjacent transparent electrodes. Their substitution by equally thin doped nanocrystalline silicon layers has often been argued to resolve these drawbacks. However, low-temperature deposition of highly crystalline doped layers of such thickness on amorphous surfaces demands sophisticated deposition engineering. In this paper, we review and discuss different strategies to facilitate the nucleation of nanocrystalline silicon layers and assess their compatibility with SHJ solar cell fabrication. We also implement the obtained layers into devices, yielding solar cells with fill factor values of over 79% and efficiencies of over 21.1%, clearly underlining the promise this material holds for SHJ solar cell applications.

This paper gives new insights into the role of both the microstructure and the interfaces in microcrystalline silicon (μc- Si) single-junction solar cells. A 3-D tomographic reconstruction of a μc-Si solar cell reveals the 2-D nature of the porous zones, which can be present within the absorber layer. Tomography thus appears as a valuable technique to provide insights into the μc- Si microstructure. Variable illumination measurements enable to study the negative impact of such porous zones on solar cells performance. The influence of such defectivematerial can bemitigated by suitable cell design, as discussed here. Finally, a hydrogen plasma cell post-deposition treatment is demonstrated to improve solar cells performance, especially on rough superstrates, enabling us to reach an outstanding 10.9% efficiency microcrystalline singlejunction solar cell.

Optimized transparent conductive oxide front electrodes are vital to further increase the efficiency of thin film silicon solar devices. We report details on the fabrication of multiscale textured zinc oxide substrates and their implementation in amorphous silicon/microcrystalline silicon tandem (micromorph) devices. Such substrates allow separate optimization of light trapping in the top and bottom cells and efficient decoupling of transparency and conduction. We show in particular the need for sharp nanoscale texturing for antireflection and light trapping in the top cell. We also show that smooth micrometer scale texturing can efficiently improve large wavelength light management without degrading the quality of the silicon material grown on the substrate. By combining the appropriate morphologies high currents can be reached in both the top and bottom subcells while conserving the optimal electrical properties of the solar cells. © 2011 IEEE.