1. Fabrication of Embedded 45-Degree Micromirror Using Liquid-Immersion Exposure for Single-Mode Optical Waveguides
- Author
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Shogo Ura, Kenji Kintaka, Yasuhiro Awatsuji, Junichi Inoue, Kenzo Nishio, and Tomonori Ogura
- Subjects
Optics ,Materials science ,Fabrication ,Guided wave testing ,business.industry ,Trench ,Single-mode optical fiber ,Dry etching ,business ,Cladding (fiber optics) ,Waveguide (optics) ,Atomic and Molecular Physics, and Optics ,Microfabrication - Abstract
A new integration technique of a 45-degree micromirror providing a vertical coupling between a free-space wave and a guided wave in a dielectric-glass waveguide for high-density intra-board optical interconnection was described. A planar waveguide consisting of a 4-μm-thickness GeO :SiO guiding core layer and a 2-μm-thickness SiO cladding layer on an SiO substrate was used for characterization of the micromirror. A trench with 8-μm depth and 8-μm width was formed in the waveguide by using a dry etching technique. A photoresist filling the trench was exposed at an angle of 45 degrees in the water to give a 45-degree taper in the trench. Au was evaporated on the taper to give high-reflection micromirror. An excess loss due to the micromirror insertion was estimated to be about 2 dB by comparing insertion losses of waveguides with and without the micromirror.
- Published
- 2012
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