1. NIR Photodetector Based on Nanosecond Laser-Modified Silicon
- Author
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Xian-Bin Li, Hong-Bo Sun, Ji-Hong Zhao, Chun-Hao Li, Qi-Dai Chen, and Zhanguo Chen
- Subjects
010302 applied physics ,Photon ,Materials science ,Silicon ,business.industry ,Band gap ,Annealing (metallurgy) ,Photodetector ,chemistry.chemical_element ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Electronic, Optical and Magnetic Materials ,Photodiode ,law.invention ,chemistry ,law ,0103 physical sciences ,Optoelectronics ,Crystalline silicon ,Electrical and Electronic Engineering ,0210 nano-technology ,business ,Photonic crystal - Abstract
A crystalline silicon (Si) surface was modified using nanosecond laser pulses in an argon atmosphere. The laser-modified Si (M-Si) samples have a higher performance and thermostable absorption in the broadband range (400–2400 nm) than conventional Si. The concentration of carrier electrons in the M-Si layer is at least five orders of magnitude greater than the carrier concentration of the Si substrate. Using the N+–N− junction formed between the M-Si layer and the Si substrate, visible and near-infrared (VIS-NIR) M-Si photodetectors are made. The N+–N− photodiode has good rectification characteristics and a high photoresponse to the subbandgap NIR light at 1310 nm. At the same time, the M-Si photodetector at a low reverse bias shows a large gain to the VIS-NIR light above the bandgap. By comparing the response time of the M-Si photodetector to the light of 900 and 1310 nm, the response speed of the device to the photon above-bandgap energy is faster.
- Published
- 2018
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