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Start Over Author "Tadashi Minotani" Publisher institute of electrical engineers of japan (iee japan)
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1. Microfabrication Technology for Millimeter-Wave Photonic Systems on Si

Author

Tadashi Minotani, Masaki Yano, Shouji Yagi, Hiromu Ishii, Katsuyuki Machida, Hakaru Kyuragi, Kazuhisa Kudou, Tadao Nagatsuma, and Yakov Royter

Subjects
Materials science, business.industry, Wafer bonding, Mechanical Engineering, Extremely high frequency, Copper interconnect, Electronic engineering, Optoelectronics, Electrical and Electronic Engineering, Photonics, business, Microfabrication
Published
2004
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