1. Modeling of Electron Kinetics in BF3.
- Author
-
Nikitovic, Ž., Šašić, O., Raspopović, Z., Stojanović, V., Radovanov, S., Mozetič, M., and Cvelbar, U.
- Subjects
ELECTRON scattering ,DYNAMICS ,NUCLEAR cross sections ,MONTE Carlo method ,ELECTRIC fields ,ELECTRON bombardment conductivity ,DIFFUSION ,PLASMA devices ,ION bombardment - Abstract
In this paper we used the available data for the electron impact scattering cross sections BF
3 to calculate the transport coefficients for electrons. Monte Carlo simulation was used to perform calculations of the transport coefficients as well as the rate coefficients in DC electric fields, crossed electric and magnetic DC and RF fields. [ABSTRACT FROM AUTHOR]- Published
- 2010