1. Strain profiles in thin films: influence of a coherently diffracting substrate and thickness fluctuations
- Author
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Florine Conchon, René Guinebretière, Alexandre Boulle, IRCER - Axe 3 : organisation structurale multiéchelle des matériaux (IRCER-AXE3), Institut de Recherche sur les CERamiques (IRCER), Institut de Chimie du CNRS (INC)-Institut des Procédés Appliqués aux Matériaux (IPAM), Université de Limoges (UNILIM)-Université de Limoges (UNILIM)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Institut des Procédés Appliqués aux Matériaux (IPAM), Université de Limoges (UNILIM)-Université de Limoges (UNILIM)-Centre National de la Recherche Scientifique (CNRS), Institut Pprime (PPRIME), ENSMA-Centre National de la Recherche Scientifique (CNRS)-Université de Poitiers, Axe 3 : organisation structurale multiéchelle des matériaux, Science des Procédés Céramiques et de Traitements de Surface (SPCTS), Université de Limoges (UNILIM)-Ecole Nationale Supérieure de Céramique Industrielle (ENSCI)-Institut des Procédés Appliqués aux Matériaux (IPAM), Université de Limoges (UNILIM)-Université de Limoges (UNILIM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Limoges (UNILIM)-Ecole Nationale Supérieure de Céramique Industrielle (ENSCI)-Institut des Procédés Appliqués aux Matériaux (IPAM), Université de Limoges (UNILIM)-Université de Limoges (UNILIM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institut des Procédés Appliqués aux Matériaux (IPAM), Université de Limoges (UNILIM)-Université de Limoges (UNILIM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut des Procédés Appliqués aux Matériaux (IPAM), and Université de Poitiers-ENSMA-Centre National de la Recherche Scientifique (CNRS)
- Subjects
Diffraction ,Materials science ,02 engineering and technology ,Substrate (electronics) ,Curvature ,Epitaxy ,01 natural sciences ,General Biochemistry, Genetics and Molecular Biology ,Condensed Matter::Materials Science ,Optics ,0103 physical sciences ,strain profiles ,Vertical displacement ,Thin film ,010302 applied physics ,Smoothness (probability theory) ,Strain (chemistry) ,Condensed matter physics ,business.industry ,high-resolution X-ray diffraction ,[CHIM.MATE]Chemical Sciences/Material chemistry ,021001 nanoscience & nanotechnology ,thin films ,0210 nano-technology ,business - Abstract
A simple least-squares fitting-based method is described for the determination of strain profiles in epitaxial films using high-resolution X-ray diffraction. The method is model-independent,i.e.it does not require any `guess' model for the shape of the strain profile. The shape of the vertical displacement profile is modelled using the versatile cubicB-spline functions, which puts smoothness and curvature constraints on the fitting procedure. The effect of a coherently diffracting substrate is taken into account as well as the effects of film thickness fluctuations. The model is applied to the determination of strain profiles in SmNiO3films epitaxically grown on SrTiO3(001) substrates. The shape of the retrieved strain profile is discussed in terms of oxygen vacancies.
- Published
- 2008