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We apply metal organic chemical vapour deposition (MOCVD) of HfO2 and of ZrO2 from β-diketonate precursors to grow high-k gate dielectrics for InAlN/AlN/GaN metal oxide semiconductor (MOS)-high electron mobility transistors (HEMTs). High-k oxides of about 12 nm–14 nm are deposited for the MOS-HEMTs incorporating Ni/Au gates, whereas as a reference, Ni-contact-based 'conventional' Schottky-barrier (SB)-HEMTs are processed. The processed dielectrics decrease the gate current leakage of the HEMTs by about four orders of magnitude if compared with the SB-gated HEMTs and show superior device characteristics in terms of IDS and breakdown.

We investigate the properties of high-k dielectric insulators on GaN. 22 nm thick ZrO2 is deposited on N- or Ga-polarity GaN. Al/ZrO2/GaN metal–oxide–semiconductor and reference Au/Ni/GaN Schottky contact structures are characterized using current–voltage and capacitance–voltage methods. If compared with Schottky contacts, metal–oxide–semiconductor structures show leakage current substantially reduced for the N-polarity GaN while comparable values were obtained for the Ga-polarity GaN. The oxide relative permittivity is found to be in the range of 20–30. Light-assisted capacitance–voltage method shows density of interface states Dit ~ 1 × 1012 cm−2 eV−1 for Ga-polarity and ~2 × 1012 cm−2 eV−1 for N-polarity GaN/ZrO2. Finally, we prepared AlGaN/GaN metal–oxide–semiconductor heterostructure field-effect transistor proving minimal transconductance deterioration and small threshold voltage shift. It is suggested that ZrO2 deposition optimization may further reduce the leakage current.

This paper reports on an extensive analysis of the electrical and optical properties of GaN-based high electron mobility transistors (HEMTs) biased in a non-destructive breakdown regime. By means of a number of measurements carried out with varying voltage and temperature conditions, we show that: (i) HEMTs can reach a sustainable breakdown condition, when they are biased in current-controlled mode, with a gate voltage smaller than the pinch-off voltage; (ii) when biased in sustainable breakdown, HEMTs can emit a weak luminescence signal, localized in proximity of the drain edge; (iii) the breakdown voltage (BDV) is strongly dependent on temperature. Through a careful investigation of the drain, source and gate current components, we demonstrate that breakdown originates from two different mechanisms, depending on the gate voltage: for gate voltages close to the pinch-off, breakdown current originates from the space charge injection of electrons from the source to the drain. On the other hand, for more negative gate voltages, breakdown current originates from the injection of electrons from the gate. Finally, the analysis of the temperature dependence of the breakdown current confirms that two different mechanisms significantly contribute to current conduction at high drain voltage levels.

We experimentally prove the viability of the concept of the double-heterostructure quantum well InAlN/GaN high-electron-mobility transistor (HEMT) for the device higher robustness and reliability. In the single quantum well InAlN/GaN HEMTs, the intrinsic channel resistance increases by 300% after 1 h off-state stress; much less degradation is observed in the double-heterostructure device with an AlGaN back barrier. Physics-based device simulation proves that the back barrier blocks the rate of carrier injection into the device buffer. However, whatever the quantum well design is, the energy of the injected electrons in the buffer of InAlN/GaN-based HEMTs is higher than that in the buffer of AlGaN/GaN HEMTs. This energy may be sufficient for releasing hydrogen from GaN point defects.

We investigate Al2O3- and ZrO2/InAlN/GaN metal-oxide-semiconductor heterostructures (MOS-H) using capacitance-time transients in the temperature range of 25-300 degrees C. A deep-level transient spectroscopy based analysis revealed the maximum interface state density distributions D-it(E) up to 3 x 10(13) and 1 X 10(13) eV(-1) cm(-2) for the Al2O3/InAlN and ZrO2/InAlN interface, respectively. The integral densities of interface states correlate well with the trapping-related gate-lag effect in corresponding InAlN/GaN MOS high electron mobility transistors (HEMTs). This explains the strongly reduced lag effect in ZrO2 MOS HEMTs. We assume hole trapping at oxide/InAlN interface to be a dominant effect responsible for the gate-lag effect in InAlN/GaN MOS HEMTs. (C) 2009 The Japan Society of Applied Physics 10.1143/JJAP.48.090201