Author: "Park, Sang-Duk" / Publisher: iop publishing - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Park, Sang-Duk"' showing total 3 results

Start Over Author "Park, Sang-Duk" Publisher iop publishing

3 results on '"Park, Sang-Duk"'

1. Precise Depth Control of Silicon Etching Using Chlorine Atomic Layer Etching

Author: Park, Sang-Duk, primary, Min, Kyung-Suk, additional, Yoon, Byoung-Young, additional, Lee, Do-Haing, additional, and Yeom, Geun-Young, additional
Published: 2005
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2. Characteristics of Ag Etching using Inductively Coupled Cl2-based Plasmas

Author: Lee, Young-Joon, primary, Park, Sang-Duk, additional, Song, Byoung-Kwan, additional, Kim, Sang-Gab, additional, Choe, Hee-Hwan, additional, Hong, Moon-Pyo, additional, and Yeom, Geun-Young, additional
Published: 2003
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3. Effects of Tin Concentration on the Electrical Properties of Room-Temperature Ion-Beam-Assisted-Evaporation-Deposited Indium Oxide Thin Films

Author: Bae, Jeong Woon, primary, Park, Sang Duk, additional, Cho, Nam Gil, additional, Lee, Do Haing, additional, and Yeom, Geun Young, additional
Published: 2002
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