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2 results on '"Takuya Takami"'

1. N2plasma etching processes of microscopic single crystals of cubic boron nitride

Author

Taro Nagahama, Takashi Yanase, Takahiro Tamura, Takuya Takami, and Toshihiro Shimada

Subjects
010302 applied physics, Materials science, Physics and Astronomy (miscellaneous), General Engineering, General Physics and Astronomy, 02 engineering and technology, Nitride, 021001 nanoscience & nanotechnology, 01 natural sciences, chemistry.chemical_compound, Chemical engineering, chemistry, Boron nitride, Etching (microfabrication), 0103 physical sciences, 0210 nano-technology
Published
2017
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2. N2 plasma etching processes of microscopic single crystals of cubic boron nitride.

Author

Takahiro Tamura, Takuya Takami, Takashi Yanase, Taro Nagahama, and Toshihiro Shimada

Abstract

We studied the N2 plasma etching of cubic boron nitride (cBN). We have developed experimental techniques for handling 200-µm-size single crystals for the preparation of surfaces with arbitrary crystal indexes, plasma processes, and surface analyses. We successfully prepared smooth surfaces of cBN with roughness smaller than 10 nm and found that the etching behavior was strongly influenced by the surface indexes. The morphology of the etched surfaces can be explained by the chemical stability of (111)B surfaces. [ABSTRACT FROM AUTHOR]

Published
2017
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