1. Deposition by Velocity Selection of Laser Ablated Particles
- Author
-
Kanji Kuba and Tadashi Sugihara
- Subjects
Materials science ,Laser ablation ,genetic structures ,business.industry ,Layer by layer ,Laser ,eye diseases ,law.invention ,Chopper ,law ,Deposition (phase transition) ,Particle ,Optoelectronics ,sense organs ,Thin film ,business - Abstract
An apparatus with a rotating mechanical chopper for thin film production has been developed. It is demonstrated that the energy of ablated particles is well selected by this method. Further, this method is applicable to Au thin film deposition and, is recognized to be useful to improve thin film quality because the number of droplets in the film are drastically decreased.
- Published
- 1995
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