1. Dual-Step Selective Homoepitaxy of Ge with Low Defect Density and Modulated Strain Based on Optimized Ge/Si Virtual Substrate.
- Author
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Xu, Buqing, Du, Yong, Wang, Guilei, Xiong, Wenjuan, Kong, Zhenzhen, Zhao, Xuewei, Miao, Yuanhao, Wang, Yijie, Lin, Hongxiao, Su, Jiale, Li, Ben, Wu, Yuanyuan, and Radamson, Henry H.
- Subjects
GERMANIUM films ,HOMOEPITAXY ,HIGH resolution electron microscopy ,ROOT-mean-squares - Abstract
In this manuscript, a novel dual-step selective epitaxy growth (SEG) of Ge was proposed to significantly decrease the defect density and to create fully strained relaxed Ge on a Si substrate. With the single-step SEG of Ge, the threading defect density (TDD) was successfully decreased from 2.9 × 10
7 cm−2 in a globally grown Ge layer to 3.2 × 105 cm−2 for a single-step SEG and to 2.84 × 105 cm−2 for the dual-step SEG of the Ge layer. This means that by introducing a single SEG step, the defect density could be reduced by two orders of magnitude, but this reduction could be further decreased by only 11.3% by introducing the second SEG step. The final root mean square (RMS) of the surface roughness was 0.64 nm. The strain has also been modulated along the cross-section of the sample. Tensile strain appears in the first global Ge layer, compressive strain in the single-step Ge layer and fully strain relaxation in the dual-step Ge layer. The material characterization was locally performed at different points by high resolution transmission electron microscopy, while it was globally performed by high resolution X-ray diffraction and photoluminescence. [ABSTRACT FROM AUTHOR]- Published
- 2022
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