1. Single-Wedge Lift-Out for Atom Probe Tomography Al/Ni Multilayers Specimen Preparation Based on Dual-Beam-FIB
- Author
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Yi Qiao, Yalong Zhao, Zheng Zhang, Binbin Liu, Fusheng Li, Huan Tong, Jintong Wu, Zhanqi Zhou, Zongwei Xu, and Yue Zhang
- Subjects
lift-out ,Control and Systems Engineering ,atom probe tomography (APT) ,single-wedge ,focused ion beam (FIB) ,Al/Ni multilayers ,Mechanical Engineering ,TJ1-1570 ,Mechanical engineering and machinery ,Electrical and Electronic Engineering ,Article - Abstract
Atomic probe tomography (APT) samples with Al/Ni multilayer structure were successfully prepared by using a focused ion beam (FIB), combining with a field emission scanning electron microscope, with a new single-wedge lift-out method and a reduced amorphous damage layer of Ga ions implantation. The optimum vertex angle and preparation parameters of APT sample were discussed. The double interdiffusion relationship of the multilayer films was successfully observed by the local electrode APT, which laid a foundation for further study of the interface composition and crystal structure of the two-phase composites. more...
- Published
- 2021
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