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Numerous modern technologies are reliant on the low-phase noise and exquisite timing stability of microwave signals. Substantial progress has been made in the field of microwave photonics, whereby low-noise microwave signals are generated by the down-conversion of ultrastable optical references using a frequency comb 1-3 . Such systems, however, are constructed with bulk or fibre optics and are difficult to further reduce in size and power consumption. In this work we address this challenge by leveraging advances in integrated photonics to demonstrate low-noise microwave generation via two-point optical frequency division 4,5 . Narrow-linewidth self-injection-locked integrated lasers 6,7 are stabilized to a miniature Fabry-Pérot cavity 8 , and the frequency gap between the lasers is divided with an efficient dark soliton frequency comb 9 . The stabilized output of the microcomb is photodetected to produce a microwave signal at 20 GHz with phase noise of -96 dBc Hz -1 at 100 Hz offset frequency that decreases to -135 dBc Hz -1 at 10 kHz offset-values that are unprecedented for an integrated photonic system. All photonic components can be heterogeneously integrated on a single chip, providing a significant advance for the application of photonics to high-precision navigation, communication and timing systems., (© 2024. The Author(s).)

Photonic integrated circuits are widely used in applications such as telecommunications and data-centre interconnects 1-5 . However, in optical systems such as microwave synthesizers 6 , optical gyroscopes 7 and atomic clocks 8 , photonic integrated circuits are still considered inferior solutions despite their advantages in size, weight, power consumption and cost. Such high-precision and highly coherent applications favour ultralow-noise laser sources to be integrated with other photonic components in a compact and robustly aligned format-that is, on a single chip-for photonic integrated circuits to replace bulk optics and fibres. There are two major issues preventing the realization of such envisioned photonic integrated circuits: the high phase noise of semiconductor lasers and the difficulty of integrating optical isolators directly on-chip. Here we challenge this convention by leveraging three-dimensional integration that results in ultralow-noise lasers with isolator-free operation for silicon photonics. Through multiple monolithic and heterogeneous processing sequences, direct on-chip integration of III-V gain medium and ultralow-loss silicon nitride waveguides with optical loss around 0.5 decibels per metre are demonstrated. Consequently, the demonstrated photonic integrated circuit enters a regime that gives rise to ultralow-noise lasers and microwave synthesizers without the need for optical isolators, owing to the ultrahigh-quality-factor cavity. Such photonic integrated circuits also offer superior scalability for complex functionalities and volume production, as well as improved stability and reliability over time. The three-dimensional integration on ultralow-loss photonic integrated circuits thus marks a critical step towards complex systems and networks on silicon., (© 2023. The Author(s).)

Periodicity in materials yields interesting and useful phenomena. Applied to the propagation of light, periodicity gives rise to photonic crystals, which can be precisely engineered for such applications as guiding and dispersing optical beams, tightly confining and trapping light resonantly, and enhancing nonlinear optical interactions. Photonic crystals can also be formed into planar lightwave circuits for the integration of optical and electrical microsystems. In a photonic crystal, the periodicity of the host medium is used to manipulate the properties of light, whereas a phononic crystal uses periodicity to manipulate mechanical vibrations. As has been demonstrated in studies of Raman-like scattering in epitaxially grown vertical cavity structures and photonic crystal fibres, the simultaneous confinement of mechanical and optical modes in periodic structures can lead to greatly enhanced light-matter interactions. A logical next step is thus to create planar circuits that act as both photonic and phononic crystals: optomechanical crystals. Here we describe the design, fabrication and characterization of a planar, silicon-chip-based optomechanical crystal capable of co-localizing and strongly coupling 200-terahertz photons and 2-gigahertz phonons. These planar optomechanical crystals bring the powerful techniques of optics and photonic crystals to bear on phononic crystals, providing exquisitely sensitive (near quantum-limited), optical measurements of mechanical vibrations, while simultaneously providing strong nonlinear interactions for optics in a large and technologically relevant range of frequencies.

The dynamic back-action caused by electromagnetic forces (radiation pressure) in optical and microwave cavities is of growing interest. Back-action cooling, for example, is being pursued as a means of achieving the quantum ground state of macroscopic mechanical oscillators. Work in the optical domain has revolved around millimetre- or micrometre-scale structures using the radiation pressure force. By comparison, in microwave devices, low-loss superconducting structures have been used for gradient-force-mediated coupling to a nanomechanical oscillator of picogram mass. Here we describe measurements of an optical system consisting of a pair of specially patterned nanoscale beams in which optical and mechanical energies are simultaneously localized to a cubic-micron-scale volume, and for which large per-photon optical gradient forces are realized. The resulting scale of the per-photon force and the mass of the structure enable the exploration of cavity optomechanical regimes in which, for example, the mechanical rigidity of the structure is dominantly provided by the internal light field itself. In addition to precision measurement and sensitive force detection, nano-optomechanics may find application in reconfigurable and tunable photonic systems, light-based radio-frequency communication and the generation of giant optical nonlinearities for wavelength conversion and optical buffering.

Over the past decade, strong interactions of light and matter at the single-photon level have enabled a wide set of scientific advances in quantum optics and quantum information science. This work has been performed principally within the setting of cavity quantum electrodynamics with diverse physical systems, including single atoms in Fabry-Perot resonators, quantum dots coupled to micropillars and photonic bandgap cavities and Cooper pairs interacting with superconducting resonators. Experiments with single, localized atoms have been at the forefront of these advances with the use of optical resonators in high-finesse Fabry-Perot configurations. As a result of the extreme technical challenges involved in further improving the multilayer dielectric mirror coatings of these resonators and in scaling to large numbers of devices, there has been increased interest in the development of alternative microcavity systems. Here we show strong coupling between individual caesium atoms and the fields of a high-quality toroidal microresonator. From observations of transit events for single atoms falling through the resonator's evanescent field, we determine the coherent coupling rate for interactions near the surface of the resonator. We develop a theoretical model to quantify our observations, demonstrating that strong coupling is achieved, with the rate of coherent coupling exceeding the dissipative rates of the atom and the cavity. Our work opens the way for investigations of optical processes with single atoms and photons in lithographically fabricated microresonators. Applications include the implementation of quantum networks, scalable quantum logic with photons, and quantum information processing on atom chips.

Optical microcavities confine light to small volumes by resonant recirculation. Devices based on optical microcavities are already indispensable for a wide range of applications and studies. For example, microcavities made of active III-V semiconductor materials control laser emission spectra to enable long-distance transmission of data over optical fibres; they also ensure narrow spot-size laser read/write beams in CD and DVD players. In quantum optical devices, microcavities can coax atoms or quantum dots to emit spontaneous photons in a desired direction or can provide an environment where dissipative mechanisms such as spontaneous emission are overcome so that quantum entanglement of radiation and matter is possible. Applications of these remarkable devices are as diverse as their geometrical and resonant properties.

The circulation of light within dielectric volumes enables storage of optical power near specific resonant frequencies and is important in a wide range of fields including cavity quantum electrodynamics, photonics, biosensing and nonlinear optics. Optical trajectories occur near the interface of the volume with its surroundings, making their performance strongly dependent upon interface quality. With a nearly atomic-scale surface finish, surface-tension-induced microcavities such as liquid droplets or spheres are superior to all other dielectric microresonant structures when comparing photon lifetime or, equivalently, cavity Q factor. Despite these advantageous properties, the physical characteristics of such systems are not easily controlled during fabrication. It is known that wafer-based processing of resonators can achieve parallel processing and control, as well as integration with other functions. However, such resonators-on-a-chip suffer from Q factors that are many orders of magnitude lower than for surface-tension-induced microcavities, making them unsuitable for ultra-high-Q experiments. Here we demonstrate a process for producing silica toroid-shaped microresonators-on-a-chip with Q factors in excess of 100 million using a combination of lithography, dry etching and a selective reflow process. Such a high Q value was previously attainable only by droplets or microspheres and represents an improvement of nearly four orders of magnitude over previous chip-based resonators.

The ability to confine and store optical energy in small volumes has implications in fields ranging from cavity quantum electrodynamics to photonics. Of all cavity geometries, micrometre-sized dielectric spherical resonators are the best in terms of their ability to store energy for long periods of time within small volumes. In the sphere, light orbits near the surface, where long confinement times (high Q) effectively wrap a large interaction distance into a tiny volume. This characteristic makes such resonators uniquely suited for studies of nonlinear coupling of light with matter. Early work recognized these attributes through Raman excitation in microdroplets-but microdroplets have not been used in practical applications. Here we demonstrate a micrometre-scale, nonlinear Raman source that has a highly efficient pump-signal conversion (higher than 35%) and pump thresholds nearly 1,000 times lower than shown before. This represents a route to compact, ultralow-threshold sources for numerous wavelength bands that are usually difficult to access. Equally important, this system can provide a compact and simple building block for studying nonlinear optical effects and the quantum aspects of light.