6 results on '"Baker, S. L."'
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2. Recovery of EUV Lithography Substrates
3. Quartz Substrates for EUV Lithography Reticles
4. Substrate Recovery of Mo-Si Multilayer Coated Optics
5. Interaction of short x-ray pulses with low-Z x-ray optics materials at the LCLS free-electron laser.
6. Recovery of Multilayer-Coated Zerodur and ULE Optics for Extreme-Ultraviolet Lithography by Recoating, Reactive-Ion Etching, and Wet-Chemical Processes.
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