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The self-organised conical needles produced by plasma etching of silicon (Si), known as black silicon (b-Si), create a form-birefringent surface texture when etching of Si orientated at angles of θ i  < 50 - 70 ° (angle between the Si surface and vertical plasma E-field). The height of the needles in the form-birefringent region following 15 min etching was d ∼ 200 nm and had a 100 μm width of the optical retardance/birefringence, characterised using polariscopy. The height of the b-Si needles corresponds closely to the skin-depth of Si ∼λ/4 for the visible spectral range. Reflection-type polariscope with a voltage-controlled liquid-crystal retarder is proposed to directly measure the retardance Δn × d/λ ≈ 0.15 of the region with tilted b-Si needles. The quantified form birefringence of Δn = -0.45 over λ = 400 - 700 nm spectral window was obtained. Such high values of Δn at visible wavelengths can only be observed in the most birefringence calcite or barium borate as well as in liquid crystals. The replication of b-Si into Ni-shim with high fidelity was also demonstrated and can be used for imprinting of the b-Si nanopattern into other materials.

This publisher's note contains corrections to Opt. Lett.45, 13 (2020).OPLEDP0146-959210.1364/OL.45.000013.

3D meso scale structures that can reach up to centimeters in overall size but retain micro- or nano-features, proved to be promising in various science fields ranging from micro-mechanical metamaterials to photonics and bio-medical scaffolds. In this work, we present synchronization of the linear and galvanometric scanners for efficient femtosecond 3D optical printing of objects at the meso-scale (from sub-μm to sub-cm spanning five orders of magnitude). In such configuration, the linear stages provide stitch-free structuring at nearly limitless (up to tens-of-cm) working area, while galvo-scanners allow to achieve translation velocities in the range of mm/s-cm/s without sacrificing nano-scale positioning accuracy and preserving the undistorted shape of the final print. The principle behind this approach is demonstrated, proving its inherent advantages in comparison to separate use of only linear stages or scanners. The printing rate is calculated in terms of voxels/s, showcasing the capability to maintain an optimal feature size while increasing throughput. Full capabilities of this approach are demonstrated by fabricating structures that reach millimeters in size but still retain sub-μm features: scaffolds for cell growth, microlenses, and photonic crystals. All this is combined into a benchmark structure: a meso-butterfly. Provided results show that synchronization of two scan modes is crucial for the end goal of industrial-scale implementation of this technology and makes the laser printing well aligned with similar approaches in nanofabrication by electron and ion beams.

We present a novel hybrid glass-polymer micromechanical sensor by combining two femtosecond laser direct writing processes: laser illumination followed by chemical etching of glass and two-photon polymerization. This incorporation of techniques demonstrates the capability of combining mechanical deformable devices made of silica with an integrated polymer structure for passive chemical sensing application. We demonstrate that such a sensor could be utilized for investigating the elastic properties of polymeric microstructures fabricated via the two-photon polymerization technique. Moreover, we show that polymeric microstructure stiffness increases when immersed in organic liquids.

We propose a novel class of refractive optical elements by wrinkling the conical surface of a usual (conical) axicon, which leads to geometrical singularities (cusps). Such wrinkled axicons have been fabricated at the micron scale by using three-dimensional femtosecond-laser photopolymerization technique and we report on their experimental and numerical characterization. The beam shaping capabilities of these structures are discussed for both intensity and phase, which includes topological beam shaping that results from azimuthally modulated optical spin-orbit interaction.

Tailoring the spatial degree of freedom of light is an essential step towards the realization of advanced optical manipulation tools. A topical challenge consists of device miniaturization for improved performance and enhanced functionality at the micron scale. We demonstrate a novel approach that combines the additive three-dimensional (3D) structuring capability of laser polymerization and the subtractive subwavelength resolution patterning of focused ion beam lithography. As a case in point hybrid (dielectric/metallic) micro-optical elements that deliver a well-defined topological shaping of light are produced. Here we report on hybrid 3D binary spiral zone plates with unit and double topological charge. Their optical performances are compared to corresponding 2D counterparts both numerically and experimentally. Cooperative refractive capabilities without compromising topological beam shaping are shown. Realization of advanced designs where the dielectric architecture itself is endowed with singular properties is also discussed.

Possibility to form three-dimensional (3D) micro-structures in silicone elastomer (polydimethylsiloxane; PDMS) doped with different photo-initiators was systematically investigated using direct laser writing with femtosecond laser pulses at different exposure conditions. Accuracy of the 3D structuring with resolution of ~5 μm and a fabrication throughput of ~720 μm(3)/s, which is exceeding the previously reported values by ~ 300(×), was achieved. Practical recording velocities of ~ 1 mm/s were used in PDMS with isopropyl-9H-thioxanthen-9-one (ISO) and thioxanthen-9-one (THIO) photo-initiators which both have absorption at around 360 nm wavelength. The 3D laser fabrication in PDMS without any photo-initiator resulting in a fully bio-compatible material has been achieved for the first time. Rates of multi-photon absorption and avalanche for the structuring of silicone are revealed: the two-photon absorption is seeding the avalanche of a radical generation for subsequent cross-linking. Direct writing enables a maskless manufacturing of molds for soft-lithography and 3D components for microfluidics as well as scaffolds for grafts in biomedical applications.

We demonstrate that black silicon (b-Si) made by dry plasma etching is a promising substrate for laser three-dimensional (3D) micro/nano-polymerization. High aspect ratio Si-needles, working as sacrificial support structures, have flexibility required to relax interface stresses between substrate and the polymerized micro-/nano- objects. Surface of b-Si can be made electrically conductive by metal deposition and, at the same time, can preserve low optical reflectivity beneficial for polymerization by direct laser writing. 3D laser polymerization usually performed at the irradiation conditions close to the dielectric breakdown is possible on non-reflective and not metallic surfaces. Here we show that low reflectivity and high metallic conductivity are not counter- exclusive properties for laser polymerization. Electrical conductivity of substrate and its permeability in liquids are promising for bio- and electroplating applications.

We apply femtosecond laser direct writing in photopolymers for manufacturing of conical microlenses and closely packed arrays thereof. We demonstrate the fabrication of high optical quality axicons of 15 µm in radius, having 150°, 160°, and 170° cone angles. Their optical properties and performance are modeled using the finite-difference time-domain method and compared with experimentally measured data. Additionally, optimization of the laser direct writing parameters regarding these types of micro-objects is presented. Possible applications of closely packed arrays of axicon microlenses are discussed, having potential attractivity in the fields of modern microscopy, light-based material processing, particle manipulation in microfluidic, and optofluidic applications.

We demonstrate capability to structure photo-polymers with sub-wavelength resolution, ∼200-500 nm, and retrieve three-dimensional (3D) structures using a picosecond laser exposure. This alternative to commonly used ultra-short femtosecond lasers extends accessibility of 3D direct write. A popular hybrid sol-gel resist SZ2080 was used for quantitative determination of structuring resolution at 1064 nm and 532 nm wavelengths and for pulses of 8-25 ps duration at the repetition rates of 0.2-1 MHz. Systematic study of feature size dependence of 3D suspended nano-rods shows that linear power dependence of photopolymerization on the dose-per-pulse becomes dominant at higher repetition rates (≥0.5 MHz) while the two-photon nonlinear absorption is still distinguishable at rates lower than 0.2 MHz and shorter pulses (≤8 ps). Thermal accumulation defines polymerization when cooling time of the focal volume is larger than separation between pulses. Photopolymerization and its scaling mechanisms, quality, and fidelity at tight focusing of fs-, ps-, and cw-laser radiation are revealed and explained. 3D scaffolds for biomedicine and microlenses for optical applications are fabricated by the ps-laser direct write.

Three-dimensional (3D) micro/nano-structuring of photo-resists is systematically studied at the close-to-dielectric- breakdown irradiance. It is demonstrated that avalanche absorption is playing a major part in free electron generation and chemical bond breaking at these conditions. The steps of photo-initiation and chemical bond breaking in propagation of polymerization are altered as compared with photo-polymerization at low-irradiance and one-photon stereo-lithography. The avalanche dominates radical generation and promotion of polymerization at tight focusing and a high approximately TW/cm(2) irradiance. The rates of electron generation by two-photon absorption and avalanche are calculated for the experimental conditions. Simulation results are corroborated by 3D polymerization in three resists with different photo-initiators at two different wavelengths and pulse durations. The smallest feature sizes of 3D polymerized logpile structures are consistent with spectral dependencies of the two photon nonlinearities. Implications of these findings for achieving sub-100 nm resolution in 3D structuring of photo-polymers are presented., ((c) 2010 Optical Society of America.)