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Start Over Author "Harder, Norbert" Publisher pennwell publishing corp.
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1. High purity chemical production: meeting the demands of ULSI

Author

Harder, Norbert

Subjects
Semiconductor industry, Standard IC, Semiconductor wafers -- Contamination -- Quality management, Semiconductor industry -- Quality management, Integrated circuits -- Contamination -- Quality management, Semiconductor chips -- Contamination -- Quality management, Contamination (Technology) -- Control, Chemicals -- Quality management
Abstract

High Purity Chemical Production: Meeting the Demands of ULSI The increasing purity of materials and chemicals demanded by the semiconductor industry has paralleled advances in integrated circuit technology since 1968 […]

Published
1990

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