1. 磁控溅射后的铂靶表面形貌分析.
- Author
-
李思勰, 闻 明, 管伟明, 沈 月, and 王传军
- Subjects
FIELD emission electron microscopes ,SURFACE morphology ,RECRYSTALLIZATION (Metallurgy) ,SURFACE temperature ,MAGNETRONS ,GRAIN size ,MAGNETRON sputtering - Abstract
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- Published
- 2022