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Start Over Author "Chuanli, Zhang" Publisher sage publications inc.
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1. Analysis of the Air-damping Effect on a Micromachined Beam Resonator.

Author

Chuanli Zhang, Guanshui Xu, and Qing Jiang

Subjects
*DAMPING (Mechanics), *FREQUENCY response, *ELECTRIC resonators, *VIBRATION (Mechanics), *ELASTIC solids
Abstract

Presents an analysis of the air-damping effect on the frequency response of a micromachined beam resonator. Analysis of the motion of the beam; Characterization of the air drag to the beam vibration; Conditions for the validation of the characterization.

Published
2003
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