1. 3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator
- Author
-
Hu Baofa, Li Zhiwei, Wan Yuanjie, Zhou Peng, Zhang Chunquan, and San Haisheng
- Subjects
surface acoustic wave ,3d printing ,gas pressure sensor ,linbo3 ,Mathematics ,QA1-939 - Abstract
This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa and temperature of 40 °C.
- Published
- 2021
- Full Text
- View/download PDF