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Start Over Author "D. A. Andronikov" Publisher scientific technical centre tata, limited company
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1. STUDY ON THE USE OF GEN5 PECVD REACTORS FOR PRODUCTION OF HIGH-EFFICIENCY SILICON HETEROJUNCTION SOLAR CELLS

Author

A. N. Abramov, G. Shelopin, I. Shakhrai, E. I. Terukov, K. Emtsev, I. Nyapshaev, D. A. Andronikov, A. Titov, G. Ivanov, S. Abolmasov, A. Semenov, and D. Orekhov

Subjects
Materials science, Plasma-enhanced chemical vapor deposition, business.industry, Silicon heterojunction, General Earth and Planetary Sciences, Optoelectronics, business, General Environmental Science
Published
2017
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