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Your search keyword '"Ma, Zhibin"' showing total 21 results
Start Over Author "Ma, Zhibin" Publisher shanghai institute of optics and fine mechanics
21 results on '"Ma, Zhibin"'

3. Laser flatting chemical vapor deposition diamond films by axial offset-focus

Author

Ma Zhibin, Zhang Zhang, Deng Yuheng, Wang Xingli, and Yan Lei

Subjects
Materials science, Laser cutting, Scanning electron microscope, business.industry, Diamond, Chemical vapor deposition, Combustion chemical vapor deposition, engineering.material, Laser, Atomic and Molecular Physics, and Optics, law.invention, Carbon film, Optical microscope, law, engineering, Optoelectronics, Electrical and Electronic Engineering, business
Abstract

Inhomogeneous chemical vapor deposition (CVD) diamond thick films are flatted by a Nd:YAG laser cutting machine with axial offset-focus. The influences of laser voltage, laser frequency and focus position on the diameter and depth of scanning spot are researched respectively. In addition, the influence of scanning step on leveling result, which is characterized by a scanning electron microscope(SEM), a roughmeter and a optical microscope, is studied. The results show that the increase of laser voltage or focus offset contributes to the increase of depth of scanning spot, and the width of scanning groove will increase with the increase of laser voltage. The roughness of the CVD diamond films is reduced significantly after a flatting process, and the graphite on the surface of the diamond film due to laser processing is efficiently removed by etching of hydrogen plasma.

Published
2013

4. Etching of CVD diamond films using oxygen cyclotron ion beams

Author

吴俊 Wu Jun, 沈武林 Shen Wulin, and 马志斌 Ma Zhibin

Subjects
Materials science, business.industry, Cyclotron, chemistry.chemical_element, Chemical vapor deposition, Oxygen, Atomic and Molecular Physics, and Optics, Ion, law.invention, Carbon film, chemistry, Etching (microfabrication), law, Optoelectronics, Electrical and Electronic Engineering, business
Published
2012

5. Plasma emission spectroscopy of methyl bromide

Author

Ma Zhibin and Weng Guofeng

Subjects
chemistry.chemical_compound, Thesaurus (information retrieval), Materials science, chemistry, Bromide, Analytical chemistry, Plasma, Emission spectrum, Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics
Published
2011

6. Non-symmetric magnetic mirror field ECR oxygen plasma etching CVD diamond films

Author

谭必松 Tan Bisong, 马志斌 Ma Zhibin, 吴振辉 Wu Zhenhui, and 沈武林 Shen Wulin

Subjects
Magnetic mirror, Oxygen plasma etching, Carbon film, Materials science, Field (physics), business.industry, Non symmetric, Optoelectronics, Chemical vapor deposition, Electrical and Electronic Engineering, Reactive-ion etching, business, Atomic and Molecular Physics, and Optics
Published
2010

9. Digital Holographic Particle Sizing with Hough Transform

Author

高岩 Gao Yan, 张以谟 Zhang Yimo, 赵晨 Zhao Chen, 马志彬 Ma Zhibin, 葛宝臻 Ge Baozhen, and 吕且妮 Lü Qieni

Subjects
Physics, Optics, business.industry, law, Holography, Particle, Electrical and Electronic Engineering, business, Atomic and Molecular Physics, and Optics, Sizing, Electronic, Optical and Magnetic Materials, Hough transform, law.invention
Published
2009

13. Mechanism of etching CVD diamond film by oxygen plasma

Author

潘鑫 Pan Xin, 马志斌 Ma Zhibin, 李国伟 Li Guowei, 曹为 Cao Wei, 王传新 Wang Chuanxin, and 付秋明 Fu Qiuming

Subjects
Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics
Published
2014

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